Simplified model for the DC planar magnetron discharge
نویسندگان
چکیده
منابع مشابه
2D PIC Simulation of the DC Discharge in Cylindrical Magnetron
PIC method of plasma simulation is widely used in plasma physics research because of its ability to solve wide range of problems in kinetic approach. Regarding to description of PIC method we refer to [Birdsall et al., 1995]. This work is focused on PIC simulations of dc discharge in cylindrical magnetron device. Magnetrons are used in industry e.g. for thin film layer coating and etching. Many...
متن کاملInfluence of O2 and N2 Concentrations on the Characteristics of Plasma in DC Cylindrical Magnetron Discharge by Langmuir Probe
Using the Langmuir probe method, the reactive plasma parameters were studied in different ratios of oxygen and nitrogen concentrations in a DC cylindrical discharge device.The plasma parameters such as plasma potential, electron density and electron temperature wereextracted from the current-voltage characteristic’s curve of Langmuir probe to find the optimum conditions for deposit the oxy...
متن کاملEffect of Thickness on Properties of Copper Thin Films Growth on Glass by DC Planar Magnetron Sputtering
Copper thin films with nano-scale structure have numerous applications in modern technology. In this work, Cu thin films with different thicknesses from 50–220 nm have been deposited on glass substrate by DC magnetron sputtering technique at room temperature in pure Ar gas. The sputtering time was considered in 4, 8, 12 and 16 min, respectively. The thickness effect on the structural, mo...
متن کاملthe use of appropriate madm model for ranking the vendors of mci equipments using fuzzy approach
abstract nowadays, the science of decision making has been paid to more attention due to the complexity of the problems of suppliers selection. as known, one of the efficient tools in economic and human resources development is the extension of communication networks in developing countries. so, the proper selection of suppliers of tc equipments is of concern very much. in this study, a ...
15 صفحه اولSimplified Approaches for Controlling Dc-dc Power Converters
This paper represents the design procedures of different compensation schemes for voltage mode controlled (VMC) dc–dc switching converters. Proportional integral derivative (PID) controllers, Fuzzy logic controllers (FLC), parallel combination of PID and FLC, and FLC tuned by PI controller have been investigated. MATLAB software is used to depict the buck converter performance with each compens...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Vacuum
سال: 2004
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2004.01.014